6/3/2011	11:32:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2011	11:32:18 AM	Recipe started at 11:32 AM
6/3/2011	11:32:18 AM	H2 valve closed
6/3/2011	11:32:18 AM	BCl3 valve closed
6/3/2011	11:32:18 AM	PH3 valve closed
6/3/2011	11:32:18 AM	SiCl4 pre valve closed
6/3/2011	11:32:18 AM	SiCl4 post valve closed
6/3/2011	11:32:18 AM	Main Vac valve closed
6/3/2011	11:32:18 AM	Bypass valve closed
6/3/2011	11:32:18 AM	Bubbler valve closed
6/3/2011	11:32:18 AM	Helium valve opened
6/3/2011	11:32:18 AM	Helium MFC set to  500.000000
6/3/2011	11:32:18 AM	H2 MFC set to  0.000000
6/3/2011	11:32:18 AM	BCl3 MFC set to  0.000000
6/3/2011	11:32:18 AM	PHl3 MFC set to  0.000000
6/3/2011	11:32:18 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:32:18 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:32:19 AM	Tube furnace set to 0
6/3/2011	11:43:24 AM	Helium valve closed
6/3/2011	11:43:24 AM	H2 valve closed
6/3/2011	11:43:24 AM	BCl3 valve closed
6/3/2011	11:43:24 AM	PH3 valve closed
6/3/2011	11:43:24 AM	SiCl4 pre valve closed
6/3/2011	11:43:24 AM	SiCl4 post valve closed
6/3/2011	11:43:24 AM	Main Vac valve closed
6/3/2011	11:43:24 AM	Bypass valve closed
6/3/2011	11:43:24 AM	Bubbler valve closed
6/3/2011	11:43:24 AM	Helium MFC set to  0.000000
6/3/2011	11:43:24 AM	H2 MFC set to  0.000000
6/3/2011	11:43:24 AM	BCl3 MFC set to  0.000000
6/3/2011	11:43:24 AM	PHl3 MFC set to  0.000000
6/3/2011	11:43:24 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:43:24 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:43:24 AM	Tube furnace set to 0
6/3/2011	11:43:24 AM	Helium valve closed
6/3/2011	11:43:24 AM	H2 valve closed
6/3/2011	11:43:24 AM	BCl3 valve closed
6/3/2011	11:43:24 AM	PH3 valve closed
6/3/2011	11:43:24 AM	SiCl4 pre valve closed
6/3/2011	11:43:24 AM	SiCl4 post valve closed
6/3/2011	11:43:24 AM	Main Vac valve closed
6/3/2011	11:43:24 AM	Bubbler valve closed
6/3/2011	11:43:24 AM	Bypass valve closed
6/3/2011	11:43:24 AM	Helium MFC set to  0.000000
6/3/2011	11:43:24 AM	H2 MFC set to  0.000000
6/3/2011	11:43:24 AM	BCl3 MFC set to  0.000000
6/3/2011	11:43:24 AM	PHl3 MFC set to  0.000000
6/3/2011	11:43:24 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:43:24 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:43:25 AM	Tube furnace set to 0
6/3/2011	11:43:25 AM	Baratron reads 942.421441 Torr.  Emergency exit.
6/3/2011	11:44:17 AM	Run aborted at 11:44 AM
6/3/2011	11:44:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2011	11:44:17 AM	Helium valve closed
6/3/2011	11:44:17 AM	H2 valve closed
6/3/2011	11:44:17 AM	BCl3 valve closed
6/3/2011	11:44:17 AM	PH3 valve closed
6/3/2011	11:44:17 AM	SiCl4 pre valve closed
6/3/2011	11:44:17 AM	SiCl4 post valve closed
6/3/2011	11:44:17 AM	Main Vac valve closed
6/3/2011	11:44:17 AM	Bubbler valve closed
6/3/2011	11:44:17 AM	Bypass valve closed
6/3/2011	11:44:17 AM	Helium MFC set to  0.000000
6/3/2011	11:44:17 AM	H2 MFC set to  0.000000
6/3/2011	11:44:17 AM	BCl3 MFC set to  0.000000
6/3/2011	11:44:17 AM	PHl3 MFC set to  0.000000
6/3/2011	11:44:17 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:44:17 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:44:17 AM	Tube furnace set to 0
6/3/2011	11:44:17 AM	Baratron reads 941.400613 Torr.  Emergency exit.
6/3/2011	11:44:19 AM	Program exited cleanly
6/3/2011	11:44:23 AM	Program started normally
6/3/2011	11:44:23 AM	Helium valve closed
6/3/2011	11:44:23 AM	H2 valve closed
6/3/2011	11:44:23 AM	BCl3 valve closed
6/3/2011	11:44:23 AM	PH3 valve closed
6/3/2011	11:44:23 AM	SiCl4 pre valve closed
6/3/2011	11:44:23 AM	SiCl4 post valve closed
6/3/2011	11:44:23 AM	Main Vac valve closed
6/3/2011	11:44:23 AM	Bypass valve closed
6/3/2011	11:44:23 AM	Bubbler valve closed
6/3/2011	11:44:23 AM	Helium MFC set to  0.000000
6/3/2011	11:44:23 AM	H2 MFC set to  0.000000
6/3/2011	11:44:23 AM	BCl3 MFC set to  0.000000
6/3/2011	11:44:23 AM	PHl3 MFC set to  0.000000
6/3/2011	11:44:23 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:44:23 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:44:23 AM	Tube furnace set to 0
6/3/2011	11:44:23 AM	Helium valve closed
6/3/2011	11:44:24 AM	H2 valve closed
6/3/2011	11:44:24 AM	BCl3 valve closed
6/3/2011	11:44:24 AM	PH3 valve closed
6/3/2011	11:44:24 AM	SiCl4 pre valve closed
6/3/2011	11:44:24 AM	SiCl4 post valve closed
6/3/2011	11:44:24 AM	Main Vac valve closed
6/3/2011	11:44:24 AM	Bubbler valve closed
6/3/2011	11:44:24 AM	Bypass valve closed
6/3/2011	11:44:24 AM	Helium MFC set to  0.000000
6/3/2011	11:44:24 AM	H2 MFC set to  0.000000
6/3/2011	11:44:24 AM	BCl3 MFC set to  0.000000
6/3/2011	11:44:24 AM	PHl3 MFC set to  0.000000
6/3/2011	11:44:24 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:44:24 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:44:24 AM	Tube furnace set to 0
6/3/2011	11:44:24 AM	Baratron reads 941.400613 Torr.  Emergency exit.
6/3/2011	11:44:25 AM	Program exited cleanly
6/3/2011	11:44:31 AM	Program started normally
6/3/2011	11:44:31 AM	Helium valve closed
6/3/2011	11:44:31 AM	H2 valve closed
6/3/2011	11:44:31 AM	BCl3 valve closed
6/3/2011	11:44:31 AM	PH3 valve closed
6/3/2011	11:44:31 AM	SiCl4 pre valve closed
6/3/2011	11:44:31 AM	SiCl4 post valve closed
6/3/2011	11:44:31 AM	Main Vac valve closed
6/3/2011	11:44:31 AM	Bypass valve closed
6/3/2011	11:44:31 AM	Bubbler valve closed
6/3/2011	11:44:31 AM	Helium MFC set to  0.000000
6/3/2011	11:44:31 AM	H2 MFC set to  0.000000
6/3/2011	11:44:31 AM	BCl3 MFC set to  0.000000
6/3/2011	11:44:31 AM	PHl3 MFC set to  0.000000
6/3/2011	11:44:31 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:44:31 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:44:31 AM	Tube furnace set to 0
6/3/2011	11:44:31 AM	Helium valve closed
6/3/2011	11:44:31 AM	H2 valve closed
6/3/2011	11:44:31 AM	BCl3 valve closed
6/3/2011	11:44:31 AM	PH3 valve closed
6/3/2011	11:44:31 AM	SiCl4 pre valve closed
6/3/2011	11:44:31 AM	SiCl4 post valve closed
6/3/2011	11:44:31 AM	Main Vac valve closed
6/3/2011	11:44:31 AM	Bubbler valve closed
6/3/2011	11:44:31 AM	Bypass valve closed
6/3/2011	11:44:31 AM	Helium MFC set to  0.000000
6/3/2011	11:44:31 AM	H2 MFC set to  0.000000
6/3/2011	11:44:31 AM	BCl3 MFC set to  0.000000
6/3/2011	11:44:31 AM	PHl3 MFC set to  0.000000
6/3/2011	11:44:31 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:44:31 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:44:31 AM	Tube furnace set to 0
6/3/2011	11:44:31 AM	Baratron reads 941.400613 Torr.  Emergency exit.
6/3/2011	11:44:35 AM	Program exited cleanly
6/3/2011	11:45:08 AM	Program started normally
6/3/2011	11:45:08 AM	Helium valve closed
6/3/2011	11:45:08 AM	H2 valve closed
6/3/2011	11:45:08 AM	BCl3 valve closed
6/3/2011	11:45:08 AM	PH3 valve closed
6/3/2011	11:45:08 AM	SiCl4 pre valve closed
6/3/2011	11:45:08 AM	SiCl4 post valve closed
6/3/2011	11:45:08 AM	Main Vac valve closed
6/3/2011	11:45:08 AM	Bypass valve closed
6/3/2011	11:45:08 AM	Bubbler valve closed
6/3/2011	11:45:08 AM	Helium MFC set to  0.000000
6/3/2011	11:45:08 AM	H2 MFC set to  0.000000
6/3/2011	11:45:08 AM	BCl3 MFC set to  0.000000
6/3/2011	11:45:08 AM	PHl3 MFC set to  0.000000
6/3/2011	11:45:08 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:45:08 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:45:08 AM	Tube furnace set to 0
6/3/2011	11:45:09 AM	Helium valve closed
6/3/2011	11:45:09 AM	H2 valve closed
6/3/2011	11:45:09 AM	BCl3 valve closed
6/3/2011	11:45:09 AM	PH3 valve closed
6/3/2011	11:45:09 AM	SiCl4 pre valve closed
6/3/2011	11:45:09 AM	SiCl4 post valve closed
6/3/2011	11:45:09 AM	Main Vac valve closed
6/3/2011	11:45:09 AM	Bubbler valve closed
6/3/2011	11:45:09 AM	Bypass valve closed
6/3/2011	11:45:09 AM	Helium MFC set to  0.000000
6/3/2011	11:45:09 AM	H2 MFC set to  0.000000
6/3/2011	11:45:09 AM	BCl3 MFC set to  0.000000
6/3/2011	11:45:09 AM	PHl3 MFC set to  0.000000
6/3/2011	11:45:09 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:45:09 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:45:09 AM	Tube furnace set to 0
6/3/2011	11:45:09 AM	Baratron reads 940.379785 Torr.  Emergency exit.
6/3/2011	11:45:13 AM	Program exited cleanly
6/3/2011	11:52:11 AM	Program started normally
6/3/2011	11:52:11 AM	Helium valve closed
6/3/2011	11:52:11 AM	H2 valve closed
6/3/2011	11:52:11 AM	BCl3 valve closed
6/3/2011	11:52:11 AM	PH3 valve closed
6/3/2011	11:52:11 AM	SiCl4 pre valve closed
6/3/2011	11:52:11 AM	SiCl4 post valve closed
6/3/2011	11:52:11 AM	Main Vac valve closed
6/3/2011	11:52:11 AM	Bypass valve closed
6/3/2011	11:52:11 AM	Bubbler valve closed
6/3/2011	11:52:11 AM	Helium MFC set to  0.000000
6/3/2011	11:52:11 AM	H2 MFC set to  0.000000
6/3/2011	11:52:11 AM	BCl3 MFC set to  0.000000
6/3/2011	11:52:11 AM	PHl3 MFC set to  0.000000
6/3/2011	11:52:11 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:52:11 AM	Bypass solenoid MFC set to  760.000000
6/3/2011	11:52:11 AM	Tube furnace set to 0
6/3/2011	11:52:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2011	11:52:13 AM	Recipe started at 11:52 AM
6/3/2011	11:52:13 AM	Helium valve closed
6/3/2011	11:52:13 AM	H2 valve closed
6/3/2011	11:52:13 AM	BCl3 valve closed
6/3/2011	11:52:13 AM	PH3 valve closed
6/3/2011	11:52:13 AM	SiCl4 pre valve closed
6/3/2011	11:52:13 AM	SiCl4 post valve closed
6/3/2011	11:52:13 AM	Main Vac valve closed
6/3/2011	11:52:13 AM	Bubbler valve closed
6/3/2011	11:52:13 AM	Bypass valve opened
6/3/2011	11:52:13 AM	Helium MFC set to  0.000000
6/3/2011	11:52:13 AM	H2 MFC set to  0.000000
6/3/2011	11:52:13 AM	BCl3 MFC set to  0.000000
6/3/2011	11:52:13 AM	PHl3 MFC set to  0.000000
6/3/2011	11:52:13 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:52:13 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:52:14 AM	Tube furnace set to 0
6/3/2011	11:54:41 AM	Helium valve closed
6/3/2011	11:54:41 AM	H2 valve closed
6/3/2011	11:54:41 AM	BCl3 valve closed
6/3/2011	11:54:41 AM	PH3 valve closed
6/3/2011	11:54:41 AM	SiCl4 pre valve closed
6/3/2011	11:54:41 AM	SiCl4 post valve closed
6/3/2011	11:54:41 AM	Bubbler valve closed
6/3/2011	11:54:41 AM	Main Vac valve opened
6/3/2011	11:54:41 AM	Bypass valve opened
6/3/2011	11:54:41 AM	Helium MFC set to  0.000000
6/3/2011	11:54:41 AM	H2 MFC set to  0.000000
6/3/2011	11:54:41 AM	BCl3 MFC set to  0.000000
6/3/2011	11:54:41 AM	PHl3 MFC set to  0.000000
6/3/2011	11:54:41 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:54:41 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:54:41 AM	Tube furnace set to 0
6/3/2011	11:54:42 AM	Run finished at 11:54 AM
6/3/2011	11:54:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2011	11:55:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/3/2011	11:55:25 AM	Recipe started at 11:55 AM
6/3/2011	11:55:25 AM	Helium valve closed
6/3/2011	11:55:25 AM	H2 valve closed
6/3/2011	11:55:25 AM	BCl3 valve closed
6/3/2011	11:55:25 AM	PH3 valve closed
6/3/2011	11:55:25 AM	SiCl4 pre valve closed
6/3/2011	11:55:25 AM	SiCl4 post valve closed
6/3/2011	11:55:25 AM	Main Vac valve closed
6/3/2011	11:55:25 AM	Bubbler valve closed
6/3/2011	11:55:25 AM	Bypass valve opened
6/3/2011	11:55:25 AM	Helium MFC set to  0.000000
6/3/2011	11:55:25 AM	H2 MFC set to  0.000000
6/3/2011	11:55:25 AM	BCl3 MFC set to  0.000000
6/3/2011	11:55:25 AM	PHl3 MFC set to  0.000000
6/3/2011	11:55:25 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:55:25 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:55:25 AM	Tube furnace set to 0
6/3/2011	11:55:25 AM	Helium valve closed
6/3/2011	11:55:25 AM	H2 valve closed
6/3/2011	11:55:25 AM	BCl3 valve closed
6/3/2011	11:55:25 AM	PH3 valve closed
6/3/2011	11:55:25 AM	SiCl4 pre valve closed
6/3/2011	11:55:25 AM	SiCl4 post valve closed
6/3/2011	11:55:25 AM	Bubbler valve closed
6/3/2011	11:55:25 AM	Main Vac valve opened
6/3/2011	11:55:25 AM	Bypass valve opened
6/3/2011	11:55:25 AM	Helium MFC set to  0.000000
6/3/2011	11:55:25 AM	H2 MFC set to  0.000000
6/3/2011	11:55:25 AM	BCl3 MFC set to  0.000000
6/3/2011	11:55:25 AM	PHl3 MFC set to  0.000000
6/3/2011	11:55:25 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:55:25 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:55:25 AM	Tube furnace set to 0
6/3/2011	11:56:25 AM	H2 valve closed
6/3/2011	11:56:25 AM	BCl3 valve closed
6/3/2011	11:56:25 AM	PH3 valve closed
6/3/2011	11:56:25 AM	SiCl4 pre valve closed
6/3/2011	11:56:25 AM	SiCl4 post valve closed
6/3/2011	11:56:25 AM	Bubbler valve closed
6/3/2011	11:56:25 AM	Helium valve opened
6/3/2011	11:56:25 AM	Main Vac valve opened
6/3/2011	11:56:25 AM	Bypass valve opened
6/3/2011	11:56:25 AM	Helium MFC set to  100.000000
6/3/2011	11:56:25 AM	H2 MFC set to  0.000000
6/3/2011	11:56:25 AM	BCl3 MFC set to  0.000000
6/3/2011	11:56:25 AM	PHl3 MFC set to  0.000000
6/3/2011	11:56:25 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:56:25 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:56:26 AM	Tube furnace set to 0
6/3/2011	11:57:26 AM	Helium valve closed
6/3/2011	11:57:26 AM	H2 valve closed
6/3/2011	11:57:26 AM	BCl3 valve closed
6/3/2011	11:57:26 AM	PH3 valve closed
6/3/2011	11:57:26 AM	SiCl4 pre valve closed
6/3/2011	11:57:26 AM	SiCl4 post valve closed
6/3/2011	11:57:26 AM	Bubbler valve closed
6/3/2011	11:57:26 AM	Main Vac valve opened
6/3/2011	11:57:26 AM	Bypass valve opened
6/3/2011	11:57:26 AM	Helium MFC set to  0.000000
6/3/2011	11:57:26 AM	H2 MFC set to  0.000000
6/3/2011	11:57:26 AM	BCl3 MFC set to  0.000000
6/3/2011	11:57:26 AM	PHl3 MFC set to  0.000000
6/3/2011	11:57:26 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:57:26 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:57:26 AM	Tube furnace set to 0
6/3/2011	11:58:26 AM	H2 valve closed
6/3/2011	11:58:26 AM	BCl3 valve closed
6/3/2011	11:58:26 AM	PH3 valve closed
6/3/2011	11:58:26 AM	SiCl4 pre valve closed
6/3/2011	11:58:26 AM	SiCl4 post valve closed
6/3/2011	11:58:26 AM	Bubbler valve closed
6/3/2011	11:58:26 AM	Helium valve opened
6/3/2011	11:58:26 AM	Main Vac valve opened
6/3/2011	11:58:26 AM	Bypass valve opened
6/3/2011	11:58:26 AM	Helium MFC set to  100.000000
6/3/2011	11:58:26 AM	H2 MFC set to  0.000000
6/3/2011	11:58:26 AM	BCl3 MFC set to  0.000000
6/3/2011	11:58:26 AM	PHl3 MFC set to  0.000000
6/3/2011	11:58:26 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:58:26 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:58:26 AM	Tube furnace set to 0
6/3/2011	11:59:26 AM	Helium valve closed
6/3/2011	11:59:26 AM	H2 valve closed
6/3/2011	11:59:26 AM	BCl3 valve closed
6/3/2011	11:59:26 AM	PH3 valve closed
6/3/2011	11:59:26 AM	SiCl4 pre valve closed
6/3/2011	11:59:26 AM	SiCl4 post valve closed
6/3/2011	11:59:26 AM	Bubbler valve closed
6/3/2011	11:59:26 AM	Main Vac valve opened
6/3/2011	11:59:26 AM	Bypass valve opened
6/3/2011	11:59:26 AM	Helium MFC set to  0.000000
6/3/2011	11:59:26 AM	H2 MFC set to  0.000000
6/3/2011	11:59:26 AM	BCl3 MFC set to  0.000000
6/3/2011	11:59:26 AM	PHl3 MFC set to  0.000000
6/3/2011	11:59:26 AM	SiCl4 MFC set to  0.000000
6/3/2011	11:59:26 AM	Bypass solenoid MFC set to  0.000000
6/3/2011	11:59:26 AM	Tube furnace set to 0
6/3/2011	12:00:26 PM	H2 valve closed
6/3/2011	12:00:26 PM	BCl3 valve closed
6/3/2011	12:00:26 PM	PH3 valve closed
6/3/2011	12:00:26 PM	SiCl4 pre valve closed
6/3/2011	12:00:26 PM	SiCl4 post valve closed
6/3/2011	12:00:26 PM	Bubbler valve closed
6/3/2011	12:00:26 PM	Helium valve opened
6/3/2011	12:00:26 PM	Main Vac valve opened
6/3/2011	12:00:26 PM	Bypass valve opened
6/3/2011	12:00:26 PM	Helium MFC set to  100.000000
6/3/2011	12:00:26 PM	H2 MFC set to  0.000000
6/3/2011	12:00:26 PM	BCl3 MFC set to  0.000000
6/3/2011	12:00:26 PM	PHl3 MFC set to  0.000000
6/3/2011	12:00:26 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:00:26 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:00:26 PM	Tube furnace set to 0
6/3/2011	12:01:26 PM	Helium valve closed
6/3/2011	12:01:26 PM	H2 valve closed
6/3/2011	12:01:26 PM	BCl3 valve closed
6/3/2011	12:01:26 PM	PH3 valve closed
6/3/2011	12:01:26 PM	SiCl4 pre valve closed
6/3/2011	12:01:26 PM	SiCl4 post valve closed
6/3/2011	12:01:26 PM	Bubbler valve closed
6/3/2011	12:01:26 PM	Main Vac valve opened
6/3/2011	12:01:26 PM	Bypass valve opened
6/3/2011	12:01:26 PM	Helium MFC set to  0.000000
6/3/2011	12:01:26 PM	H2 MFC set to  0.000000
6/3/2011	12:01:26 PM	BCl3 MFC set to  0.000000
6/3/2011	12:01:26 PM	PHl3 MFC set to  0.000000
6/3/2011	12:01:26 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:01:26 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:01:27 PM	Tube furnace set to 0
6/3/2011	12:02:27 PM	H2 valve closed
6/3/2011	12:02:27 PM	BCl3 valve closed
6/3/2011	12:02:27 PM	PH3 valve closed
6/3/2011	12:02:27 PM	SiCl4 pre valve closed
6/3/2011	12:02:27 PM	SiCl4 post valve closed
6/3/2011	12:02:27 PM	Bubbler valve closed
6/3/2011	12:02:27 PM	Helium valve opened
6/3/2011	12:02:27 PM	Main Vac valve opened
6/3/2011	12:02:27 PM	Bypass valve opened
6/3/2011	12:02:27 PM	Helium MFC set to  100.000000
6/3/2011	12:02:27 PM	H2 MFC set to  0.000000
6/3/2011	12:02:27 PM	BCl3 MFC set to  0.000000
6/3/2011	12:02:27 PM	PHl3 MFC set to  0.000000
6/3/2011	12:02:27 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:02:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:02:27 PM	Tube furnace set to 0
6/3/2011	12:03:27 PM	Helium valve closed
6/3/2011	12:03:27 PM	H2 valve closed
6/3/2011	12:03:27 PM	BCl3 valve closed
6/3/2011	12:03:27 PM	PH3 valve closed
6/3/2011	12:03:27 PM	SiCl4 pre valve closed
6/3/2011	12:03:27 PM	SiCl4 post valve closed
6/3/2011	12:03:27 PM	Bubbler valve closed
6/3/2011	12:03:27 PM	Main Vac valve opened
6/3/2011	12:03:27 PM	Bypass valve opened
6/3/2011	12:03:27 PM	Helium MFC set to  0.000000
6/3/2011	12:03:27 PM	H2 MFC set to  0.000000
6/3/2011	12:03:27 PM	BCl3 MFC set to  0.000000
6/3/2011	12:03:27 PM	PHl3 MFC set to  0.000000
6/3/2011	12:03:27 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:03:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:03:27 PM	Tube furnace set to 0
6/3/2011	12:04:27 PM	H2 valve closed
6/3/2011	12:04:27 PM	BCl3 valve closed
6/3/2011	12:04:27 PM	PH3 valve closed
6/3/2011	12:04:27 PM	SiCl4 pre valve closed
6/3/2011	12:04:27 PM	SiCl4 post valve closed
6/3/2011	12:04:27 PM	Bubbler valve closed
6/3/2011	12:04:27 PM	Helium valve opened
6/3/2011	12:04:27 PM	Main Vac valve opened
6/3/2011	12:04:27 PM	Bypass valve opened
6/3/2011	12:04:27 PM	Helium MFC set to  100.000000
6/3/2011	12:04:27 PM	H2 MFC set to  0.000000
6/3/2011	12:04:27 PM	BCl3 MFC set to  0.000000
6/3/2011	12:04:27 PM	PHl3 MFC set to  0.000000
6/3/2011	12:04:27 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:04:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:04:27 PM	Tube furnace set to 0
6/3/2011	12:05:27 PM	Helium valve closed
6/3/2011	12:05:27 PM	H2 valve closed
6/3/2011	12:05:27 PM	BCl3 valve closed
6/3/2011	12:05:27 PM	PH3 valve closed
6/3/2011	12:05:27 PM	SiCl4 pre valve closed
6/3/2011	12:05:27 PM	SiCl4 post valve closed
6/3/2011	12:05:27 PM	Bubbler valve closed
6/3/2011	12:05:27 PM	Main Vac valve opened
6/3/2011	12:05:27 PM	Bypass valve opened
6/3/2011	12:05:27 PM	Helium MFC set to  0.000000
6/3/2011	12:05:27 PM	H2 MFC set to  0.000000
6/3/2011	12:05:27 PM	BCl3 MFC set to  0.000000
6/3/2011	12:05:27 PM	PHl3 MFC set to  0.000000
6/3/2011	12:05:27 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:05:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:05:27 PM	Tube furnace set to 0
6/3/2011	12:06:27 PM	H2 valve closed
6/3/2011	12:06:27 PM	BCl3 valve closed
6/3/2011	12:06:27 PM	PH3 valve closed
6/3/2011	12:06:27 PM	SiCl4 pre valve closed
6/3/2011	12:06:27 PM	SiCl4 post valve closed
6/3/2011	12:06:27 PM	Bubbler valve closed
6/3/2011	12:06:27 PM	Helium valve opened
6/3/2011	12:06:27 PM	Main Vac valve opened
6/3/2011	12:06:27 PM	Bypass valve opened
6/3/2011	12:06:27 PM	Helium MFC set to  100.000000
6/3/2011	12:06:27 PM	H2 MFC set to  0.000000
6/3/2011	12:06:27 PM	BCl3 MFC set to  0.000000
6/3/2011	12:06:27 PM	PHl3 MFC set to  0.000000
6/3/2011	12:06:27 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:06:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:06:28 PM	Tube furnace set to 0
6/3/2011	12:07:28 PM	Helium valve closed
6/3/2011	12:07:28 PM	H2 valve closed
6/3/2011	12:07:28 PM	BCl3 valve closed
6/3/2011	12:07:28 PM	PH3 valve closed
6/3/2011	12:07:28 PM	SiCl4 pre valve closed
6/3/2011	12:07:28 PM	SiCl4 post valve closed
6/3/2011	12:07:28 PM	Bubbler valve closed
6/3/2011	12:07:28 PM	Main Vac valve opened
6/3/2011	12:07:28 PM	Bypass valve opened
6/3/2011	12:07:28 PM	Helium MFC set to  0.000000
6/3/2011	12:07:28 PM	H2 MFC set to  0.000000
6/3/2011	12:07:28 PM	BCl3 MFC set to  0.000000
6/3/2011	12:07:28 PM	PHl3 MFC set to  0.000000
6/3/2011	12:07:28 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:07:28 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:07:28 PM	Tube furnace set to 0
6/3/2011	12:08:28 PM	H2 valve closed
6/3/2011	12:08:28 PM	BCl3 valve closed
6/3/2011	12:08:28 PM	PH3 valve closed
6/3/2011	12:08:28 PM	SiCl4 pre valve closed
6/3/2011	12:08:28 PM	SiCl4 post valve closed
6/3/2011	12:08:28 PM	Bubbler valve closed
6/3/2011	12:08:28 PM	Helium valve opened
6/3/2011	12:08:28 PM	Main Vac valve opened
6/3/2011	12:08:28 PM	Bypass valve opened
6/3/2011	12:08:28 PM	Helium MFC set to  100.000000
6/3/2011	12:08:28 PM	H2 MFC set to  0.000000
6/3/2011	12:08:28 PM	BCl3 MFC set to  0.000000
6/3/2011	12:08:28 PM	PHl3 MFC set to  0.000000
6/3/2011	12:08:28 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:08:28 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:08:28 PM	Tube furnace set to 0
6/3/2011	12:09:28 PM	Helium valve closed
6/3/2011	12:09:28 PM	H2 valve closed
6/3/2011	12:09:28 PM	BCl3 valve closed
6/3/2011	12:09:28 PM	PH3 valve closed
6/3/2011	12:09:28 PM	SiCl4 pre valve closed
6/3/2011	12:09:28 PM	SiCl4 post valve closed
6/3/2011	12:09:28 PM	Bubbler valve closed
6/3/2011	12:09:28 PM	Main Vac valve opened
6/3/2011	12:09:28 PM	Bypass valve opened
6/3/2011	12:09:28 PM	Helium MFC set to  0.000000
6/3/2011	12:09:28 PM	H2 MFC set to  0.000000
6/3/2011	12:09:28 PM	BCl3 MFC set to  0.000000
6/3/2011	12:09:28 PM	PHl3 MFC set to  0.000000
6/3/2011	12:09:28 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:09:28 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:09:28 PM	Tube furnace set to 0
6/3/2011	12:10:28 PM	H2 valve closed
6/3/2011	12:10:28 PM	BCl3 valve closed
6/3/2011	12:10:28 PM	PH3 valve closed
6/3/2011	12:10:28 PM	SiCl4 pre valve closed
6/3/2011	12:10:28 PM	SiCl4 post valve closed
6/3/2011	12:10:28 PM	Bubbler valve closed
6/3/2011	12:10:28 PM	Helium valve opened
6/3/2011	12:10:28 PM	Main Vac valve opened
6/3/2011	12:10:28 PM	Bypass valve opened
6/3/2011	12:10:28 PM	Helium MFC set to  100.000000
6/3/2011	12:10:28 PM	H2 MFC set to  0.000000
6/3/2011	12:10:28 PM	BCl3 MFC set to  0.000000
6/3/2011	12:10:28 PM	PHl3 MFC set to  0.000000
6/3/2011	12:10:28 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:10:28 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:10:28 PM	Tube furnace set to 0
6/3/2011	12:11:28 PM	Helium valve closed
6/3/2011	12:11:28 PM	H2 valve closed
6/3/2011	12:11:28 PM	BCl3 valve closed
6/3/2011	12:11:28 PM	PH3 valve closed
6/3/2011	12:11:28 PM	SiCl4 pre valve closed
6/3/2011	12:11:28 PM	SiCl4 post valve closed
6/3/2011	12:11:28 PM	Bubbler valve closed
6/3/2011	12:11:28 PM	Main Vac valve opened
6/3/2011	12:11:28 PM	Bypass valve opened
6/3/2011	12:11:28 PM	Helium MFC set to  0.000000
6/3/2011	12:11:28 PM	H2 MFC set to  0.000000
6/3/2011	12:11:28 PM	BCl3 MFC set to  0.000000
6/3/2011	12:11:28 PM	PHl3 MFC set to  0.000000
6/3/2011	12:11:28 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:11:28 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:11:29 PM	Tube furnace set to 0
6/3/2011	12:12:29 PM	H2 valve closed
6/3/2011	12:12:29 PM	BCl3 valve closed
6/3/2011	12:12:29 PM	PH3 valve closed
6/3/2011	12:12:29 PM	SiCl4 pre valve closed
6/3/2011	12:12:29 PM	SiCl4 post valve closed
6/3/2011	12:12:29 PM	Bubbler valve closed
6/3/2011	12:12:29 PM	Helium valve opened
6/3/2011	12:12:29 PM	Main Vac valve opened
6/3/2011	12:12:29 PM	Bypass valve opened
6/3/2011	12:12:29 PM	Helium MFC set to  100.000000
6/3/2011	12:12:29 PM	H2 MFC set to  0.000000
6/3/2011	12:12:29 PM	BCl3 MFC set to  0.000000
6/3/2011	12:12:29 PM	PHl3 MFC set to  0.000000
6/3/2011	12:12:29 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:12:29 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:12:29 PM	Tube furnace set to 0
6/3/2011	12:13:29 PM	Helium valve closed
6/3/2011	12:13:29 PM	H2 valve closed
6/3/2011	12:13:29 PM	BCl3 valve closed
6/3/2011	12:13:29 PM	PH3 valve closed
6/3/2011	12:13:29 PM	SiCl4 pre valve closed
6/3/2011	12:13:29 PM	SiCl4 post valve closed
6/3/2011	12:13:29 PM	Bubbler valve closed
6/3/2011	12:13:29 PM	Main Vac valve opened
6/3/2011	12:13:29 PM	Bypass valve opened
6/3/2011	12:13:29 PM	Helium MFC set to  0.000000
6/3/2011	12:13:29 PM	H2 MFC set to  0.000000
6/3/2011	12:13:29 PM	BCl3 MFC set to  0.000000
6/3/2011	12:13:29 PM	PHl3 MFC set to  0.000000
6/3/2011	12:13:29 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:13:29 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:13:29 PM	Tube furnace set to 0
6/3/2011	12:14:29 PM	H2 valve closed
6/3/2011	12:14:29 PM	BCl3 valve closed
6/3/2011	12:14:29 PM	PH3 valve closed
6/3/2011	12:14:29 PM	SiCl4 pre valve closed
6/3/2011	12:14:29 PM	SiCl4 post valve closed
6/3/2011	12:14:29 PM	Bubbler valve closed
6/3/2011	12:14:29 PM	Helium valve opened
6/3/2011	12:14:29 PM	Main Vac valve opened
6/3/2011	12:14:29 PM	Bypass valve opened
6/3/2011	12:14:29 PM	Helium MFC set to  100.000000
6/3/2011	12:14:29 PM	H2 MFC set to  0.000000
6/3/2011	12:14:29 PM	BCl3 MFC set to  0.000000
6/3/2011	12:14:29 PM	PHl3 MFC set to  0.000000
6/3/2011	12:14:29 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:14:29 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:14:29 PM	Tube furnace set to 0
6/3/2011	12:15:29 PM	Helium valve closed
6/3/2011	12:15:29 PM	H2 valve closed
6/3/2011	12:15:29 PM	BCl3 valve closed
6/3/2011	12:15:29 PM	PH3 valve closed
6/3/2011	12:15:29 PM	SiCl4 pre valve closed
6/3/2011	12:15:29 PM	SiCl4 post valve closed
6/3/2011	12:15:29 PM	Bubbler valve closed
6/3/2011	12:15:29 PM	Main Vac valve opened
6/3/2011	12:15:29 PM	Bypass valve opened
6/3/2011	12:15:29 PM	Helium MFC set to  0.000000
6/3/2011	12:15:29 PM	H2 MFC set to  0.000000
6/3/2011	12:15:29 PM	BCl3 MFC set to  0.000000
6/3/2011	12:15:29 PM	PHl3 MFC set to  0.000000
6/3/2011	12:15:29 PM	SiCl4 MFC set to  0.000000
6/3/2011	12:15:29 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	12:15:29 PM	Tube furnace set to 0
6/3/2011	12:15:30 PM	Run finished at 12:15 PM
6/3/2011	12:15:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/3/2011	1:21:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2011	1:21:10 PM	Recipe started at 1:21 PM
6/3/2011	1:21:10 PM	Helium valve closed
6/3/2011	1:21:10 PM	H2 valve closed
6/3/2011	1:21:10 PM	BCl3 valve closed
6/3/2011	1:21:10 PM	PH3 valve closed
6/3/2011	1:21:10 PM	SiCl4 pre valve closed
6/3/2011	1:21:10 PM	SiCl4 post valve closed
6/3/2011	1:21:10 PM	Main Vac valve closed
6/3/2011	1:21:10 PM	Bubbler valve closed
6/3/2011	1:21:10 PM	Bypass valve opened
6/3/2011	1:21:10 PM	Helium MFC set to  0.000000
6/3/2011	1:21:10 PM	H2 MFC set to  0.000000
6/3/2011	1:21:10 PM	BCl3 MFC set to  0.000000
6/3/2011	1:21:10 PM	PHl3 MFC set to  0.000000
6/3/2011	1:21:10 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:21:10 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:21:10 PM	Tube furnace set to 0
6/3/2011	1:21:10 PM	Helium valve closed
6/3/2011	1:21:10 PM	H2 valve closed
6/3/2011	1:21:10 PM	BCl3 valve closed
6/3/2011	1:21:10 PM	PH3 valve closed
6/3/2011	1:21:10 PM	SiCl4 pre valve closed
6/3/2011	1:21:10 PM	SiCl4 post valve closed
6/3/2011	1:21:10 PM	Bubbler valve closed
6/3/2011	1:21:10 PM	Main Vac valve opened
6/3/2011	1:21:10 PM	Bypass valve opened
6/3/2011	1:21:10 PM	Helium MFC set to  0.000000
6/3/2011	1:21:10 PM	H2 MFC set to  0.000000
6/3/2011	1:21:10 PM	BCl3 MFC set to  0.000000
6/3/2011	1:21:10 PM	PHl3 MFC set to  0.000000
6/3/2011	1:21:10 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:21:10 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:21:11 PM	Tube furnace set to 0
6/3/2011	1:21:11 PM	Run finished at 1:21 PM
6/3/2011	1:21:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2011	1:21:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/3/2011	1:21:36 PM	Recipe started at 1:21 PM
6/3/2011	1:21:36 PM	Helium valve closed
6/3/2011	1:21:36 PM	H2 valve closed
6/3/2011	1:21:36 PM	BCl3 valve closed
6/3/2011	1:21:36 PM	PH3 valve closed
6/3/2011	1:21:36 PM	SiCl4 pre valve closed
6/3/2011	1:21:36 PM	SiCl4 post valve closed
6/3/2011	1:21:36 PM	Main Vac valve closed
6/3/2011	1:21:36 PM	Bubbler valve closed
6/3/2011	1:21:36 PM	Bypass valve opened
6/3/2011	1:21:36 PM	Helium MFC set to  0.000000
6/3/2011	1:21:36 PM	H2 MFC set to  0.000000
6/3/2011	1:21:36 PM	BCl3 MFC set to  0.000000
6/3/2011	1:21:36 PM	PHl3 MFC set to  0.000000
6/3/2011	1:21:36 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:21:36 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:21:36 PM	Tube furnace set to 0
6/3/2011	1:21:37 PM	Helium valve closed
6/3/2011	1:21:37 PM	H2 valve closed
6/3/2011	1:21:37 PM	BCl3 valve closed
6/3/2011	1:21:37 PM	PH3 valve closed
6/3/2011	1:21:37 PM	SiCl4 pre valve closed
6/3/2011	1:21:37 PM	SiCl4 post valve closed
6/3/2011	1:21:37 PM	Bubbler valve closed
6/3/2011	1:21:37 PM	Main Vac valve opened
6/3/2011	1:21:37 PM	Bypass valve opened
6/3/2011	1:21:37 PM	Helium MFC set to  0.000000
6/3/2011	1:21:37 PM	H2 MFC set to  0.000000
6/3/2011	1:21:37 PM	BCl3 MFC set to  0.000000
6/3/2011	1:21:37 PM	PHl3 MFC set to  0.000000
6/3/2011	1:21:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:21:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:21:37 PM	Tube furnace set to 0
6/3/2011	1:22:37 PM	H2 valve closed
6/3/2011	1:22:37 PM	BCl3 valve closed
6/3/2011	1:22:37 PM	PH3 valve closed
6/3/2011	1:22:37 PM	SiCl4 pre valve closed
6/3/2011	1:22:37 PM	SiCl4 post valve closed
6/3/2011	1:22:37 PM	Bubbler valve closed
6/3/2011	1:22:37 PM	Helium valve opened
6/3/2011	1:22:37 PM	Main Vac valve opened
6/3/2011	1:22:37 PM	Bypass valve opened
6/3/2011	1:22:37 PM	Helium MFC set to  100.000000
6/3/2011	1:22:37 PM	H2 MFC set to  0.000000
6/3/2011	1:22:37 PM	BCl3 MFC set to  0.000000
6/3/2011	1:22:37 PM	PHl3 MFC set to  0.000000
6/3/2011	1:22:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:22:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:22:37 PM	Tube furnace set to 0
6/3/2011	1:23:37 PM	Helium valve closed
6/3/2011	1:23:37 PM	H2 valve closed
6/3/2011	1:23:37 PM	BCl3 valve closed
6/3/2011	1:23:37 PM	PH3 valve closed
6/3/2011	1:23:37 PM	SiCl4 pre valve closed
6/3/2011	1:23:37 PM	SiCl4 post valve closed
6/3/2011	1:23:37 PM	Bubbler valve closed
6/3/2011	1:23:37 PM	Main Vac valve opened
6/3/2011	1:23:37 PM	Bypass valve opened
6/3/2011	1:23:37 PM	Helium MFC set to  0.000000
6/3/2011	1:23:37 PM	H2 MFC set to  0.000000
6/3/2011	1:23:37 PM	BCl3 MFC set to  0.000000
6/3/2011	1:23:37 PM	PHl3 MFC set to  0.000000
6/3/2011	1:23:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:23:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:23:37 PM	Tube furnace set to 0
6/3/2011	1:24:37 PM	H2 valve closed
6/3/2011	1:24:37 PM	BCl3 valve closed
6/3/2011	1:24:37 PM	PH3 valve closed
6/3/2011	1:24:37 PM	SiCl4 pre valve closed
6/3/2011	1:24:37 PM	SiCl4 post valve closed
6/3/2011	1:24:37 PM	Bubbler valve closed
6/3/2011	1:24:37 PM	Helium valve opened
6/3/2011	1:24:37 PM	Main Vac valve opened
6/3/2011	1:24:37 PM	Bypass valve opened
6/3/2011	1:24:37 PM	Helium MFC set to  100.000000
6/3/2011	1:24:37 PM	H2 MFC set to  0.000000
6/3/2011	1:24:37 PM	BCl3 MFC set to  0.000000
6/3/2011	1:24:37 PM	PHl3 MFC set to  0.000000
6/3/2011	1:24:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:24:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:24:38 PM	Tube furnace set to 0
6/3/2011	1:25:38 PM	Helium valve closed
6/3/2011	1:25:38 PM	H2 valve closed
6/3/2011	1:25:38 PM	BCl3 valve closed
6/3/2011	1:25:38 PM	PH3 valve closed
6/3/2011	1:25:38 PM	SiCl4 pre valve closed
6/3/2011	1:25:38 PM	SiCl4 post valve closed
6/3/2011	1:25:38 PM	Bubbler valve closed
6/3/2011	1:25:38 PM	Main Vac valve opened
6/3/2011	1:25:38 PM	Bypass valve opened
6/3/2011	1:25:38 PM	Helium MFC set to  0.000000
6/3/2011	1:25:38 PM	H2 MFC set to  0.000000
6/3/2011	1:25:38 PM	BCl3 MFC set to  0.000000
6/3/2011	1:25:38 PM	PHl3 MFC set to  0.000000
6/3/2011	1:25:38 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:25:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:25:38 PM	Tube furnace set to 0
6/3/2011	1:26:38 PM	H2 valve closed
6/3/2011	1:26:38 PM	BCl3 valve closed
6/3/2011	1:26:38 PM	PH3 valve closed
6/3/2011	1:26:38 PM	SiCl4 pre valve closed
6/3/2011	1:26:38 PM	SiCl4 post valve closed
6/3/2011	1:26:38 PM	Bubbler valve closed
6/3/2011	1:26:38 PM	Helium valve opened
6/3/2011	1:26:38 PM	Main Vac valve opened
6/3/2011	1:26:38 PM	Bypass valve opened
6/3/2011	1:26:38 PM	Helium MFC set to  100.000000
6/3/2011	1:26:38 PM	H2 MFC set to  0.000000
6/3/2011	1:26:38 PM	BCl3 MFC set to  0.000000
6/3/2011	1:26:38 PM	PHl3 MFC set to  0.000000
6/3/2011	1:26:38 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:26:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:26:38 PM	Tube furnace set to 0
6/3/2011	1:27:38 PM	Helium valve closed
6/3/2011	1:27:38 PM	H2 valve closed
6/3/2011	1:27:38 PM	BCl3 valve closed
6/3/2011	1:27:38 PM	PH3 valve closed
6/3/2011	1:27:38 PM	SiCl4 pre valve closed
6/3/2011	1:27:38 PM	SiCl4 post valve closed
6/3/2011	1:27:38 PM	Bubbler valve closed
6/3/2011	1:27:38 PM	Main Vac valve opened
6/3/2011	1:27:38 PM	Bypass valve opened
6/3/2011	1:27:38 PM	Helium MFC set to  0.000000
6/3/2011	1:27:38 PM	H2 MFC set to  0.000000
6/3/2011	1:27:38 PM	BCl3 MFC set to  0.000000
6/3/2011	1:27:38 PM	PHl3 MFC set to  0.000000
6/3/2011	1:27:38 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:27:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:27:38 PM	Tube furnace set to 0
6/3/2011	1:28:38 PM	H2 valve closed
6/3/2011	1:28:38 PM	BCl3 valve closed
6/3/2011	1:28:38 PM	PH3 valve closed
6/3/2011	1:28:38 PM	SiCl4 pre valve closed
6/3/2011	1:28:38 PM	SiCl4 post valve closed
6/3/2011	1:28:38 PM	Bubbler valve closed
6/3/2011	1:28:38 PM	Helium valve opened
6/3/2011	1:28:38 PM	Main Vac valve opened
6/3/2011	1:28:38 PM	Bypass valve opened
6/3/2011	1:28:38 PM	Helium MFC set to  100.000000
6/3/2011	1:28:38 PM	H2 MFC set to  0.000000
6/3/2011	1:28:38 PM	BCl3 MFC set to  0.000000
6/3/2011	1:28:38 PM	PHl3 MFC set to  0.000000
6/3/2011	1:28:38 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:28:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:28:38 PM	Tube furnace set to 0
6/3/2011	1:29:38 PM	Helium valve closed
6/3/2011	1:29:38 PM	H2 valve closed
6/3/2011	1:29:38 PM	BCl3 valve closed
6/3/2011	1:29:38 PM	PH3 valve closed
6/3/2011	1:29:38 PM	SiCl4 pre valve closed
6/3/2011	1:29:38 PM	SiCl4 post valve closed
6/3/2011	1:29:38 PM	Bubbler valve closed
6/3/2011	1:29:38 PM	Main Vac valve opened
6/3/2011	1:29:38 PM	Bypass valve opened
6/3/2011	1:29:38 PM	Helium MFC set to  0.000000
6/3/2011	1:29:38 PM	H2 MFC set to  0.000000
6/3/2011	1:29:38 PM	BCl3 MFC set to  0.000000
6/3/2011	1:29:38 PM	PHl3 MFC set to  0.000000
6/3/2011	1:29:38 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:29:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:29:39 PM	Tube furnace set to 0
6/3/2011	1:30:39 PM	H2 valve closed
6/3/2011	1:30:39 PM	BCl3 valve closed
6/3/2011	1:30:39 PM	PH3 valve closed
6/3/2011	1:30:39 PM	SiCl4 pre valve closed
6/3/2011	1:30:39 PM	SiCl4 post valve closed
6/3/2011	1:30:39 PM	Bubbler valve closed
6/3/2011	1:30:39 PM	Helium valve opened
6/3/2011	1:30:39 PM	Main Vac valve opened
6/3/2011	1:30:39 PM	Bypass valve opened
6/3/2011	1:30:39 PM	Helium MFC set to  100.000000
6/3/2011	1:30:39 PM	H2 MFC set to  0.000000
6/3/2011	1:30:39 PM	BCl3 MFC set to  0.000000
6/3/2011	1:30:39 PM	PHl3 MFC set to  0.000000
6/3/2011	1:30:39 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:30:39 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:30:39 PM	Tube furnace set to 0
6/3/2011	1:31:39 PM	Helium valve closed
6/3/2011	1:31:39 PM	H2 valve closed
6/3/2011	1:31:39 PM	BCl3 valve closed
6/3/2011	1:31:39 PM	PH3 valve closed
6/3/2011	1:31:39 PM	SiCl4 pre valve closed
6/3/2011	1:31:39 PM	SiCl4 post valve closed
6/3/2011	1:31:39 PM	Bubbler valve closed
6/3/2011	1:31:39 PM	Main Vac valve opened
6/3/2011	1:31:39 PM	Bypass valve opened
6/3/2011	1:31:39 PM	Helium MFC set to  0.000000
6/3/2011	1:31:39 PM	H2 MFC set to  0.000000
6/3/2011	1:31:39 PM	BCl3 MFC set to  0.000000
6/3/2011	1:31:39 PM	PHl3 MFC set to  0.000000
6/3/2011	1:31:39 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:31:39 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:31:39 PM	Tube furnace set to 0
6/3/2011	1:32:39 PM	H2 valve closed
6/3/2011	1:32:39 PM	BCl3 valve closed
6/3/2011	1:32:39 PM	PH3 valve closed
6/3/2011	1:32:39 PM	SiCl4 pre valve closed
6/3/2011	1:32:39 PM	SiCl4 post valve closed
6/3/2011	1:32:39 PM	Bubbler valve closed
6/3/2011	1:32:39 PM	Helium valve opened
6/3/2011	1:32:39 PM	Main Vac valve opened
6/3/2011	1:32:39 PM	Bypass valve opened
6/3/2011	1:32:39 PM	Helium MFC set to  100.000000
6/3/2011	1:32:39 PM	H2 MFC set to  0.000000
6/3/2011	1:32:39 PM	BCl3 MFC set to  0.000000
6/3/2011	1:32:39 PM	PHl3 MFC set to  0.000000
6/3/2011	1:32:39 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:32:39 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:32:39 PM	Tube furnace set to 0
6/3/2011	1:33:39 PM	Helium valve closed
6/3/2011	1:33:39 PM	H2 valve closed
6/3/2011	1:33:39 PM	BCl3 valve closed
6/3/2011	1:33:39 PM	PH3 valve closed
6/3/2011	1:33:39 PM	SiCl4 pre valve closed
6/3/2011	1:33:39 PM	SiCl4 post valve closed
6/3/2011	1:33:39 PM	Bubbler valve closed
6/3/2011	1:33:39 PM	Main Vac valve opened
6/3/2011	1:33:39 PM	Bypass valve opened
6/3/2011	1:33:39 PM	Helium MFC set to  0.000000
6/3/2011	1:33:39 PM	H2 MFC set to  0.000000
6/3/2011	1:33:39 PM	BCl3 MFC set to  0.000000
6/3/2011	1:33:39 PM	PHl3 MFC set to  0.000000
6/3/2011	1:33:39 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:33:39 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:33:39 PM	Tube furnace set to 0
6/3/2011	1:34:39 PM	H2 valve closed
6/3/2011	1:34:39 PM	BCl3 valve closed
6/3/2011	1:34:39 PM	PH3 valve closed
6/3/2011	1:34:39 PM	SiCl4 pre valve closed
6/3/2011	1:34:39 PM	SiCl4 post valve closed
6/3/2011	1:34:39 PM	Bubbler valve closed
6/3/2011	1:34:39 PM	Helium valve opened
6/3/2011	1:34:39 PM	Main Vac valve opened
6/3/2011	1:34:39 PM	Bypass valve opened
6/3/2011	1:34:39 PM	Helium MFC set to  100.000000
6/3/2011	1:34:39 PM	H2 MFC set to  0.000000
6/3/2011	1:34:39 PM	BCl3 MFC set to  0.000000
6/3/2011	1:34:39 PM	PHl3 MFC set to  0.000000
6/3/2011	1:34:39 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:34:39 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:34:40 PM	Tube furnace set to 0
6/3/2011	1:35:40 PM	Helium valve closed
6/3/2011	1:35:40 PM	H2 valve closed
6/3/2011	1:35:40 PM	BCl3 valve closed
6/3/2011	1:35:40 PM	PH3 valve closed
6/3/2011	1:35:40 PM	SiCl4 pre valve closed
6/3/2011	1:35:40 PM	SiCl4 post valve closed
6/3/2011	1:35:40 PM	Bubbler valve closed
6/3/2011	1:35:40 PM	Main Vac valve opened
6/3/2011	1:35:40 PM	Bypass valve opened
6/3/2011	1:35:40 PM	Helium MFC set to  0.000000
6/3/2011	1:35:40 PM	H2 MFC set to  0.000000
6/3/2011	1:35:40 PM	BCl3 MFC set to  0.000000
6/3/2011	1:35:40 PM	PHl3 MFC set to  0.000000
6/3/2011	1:35:40 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:35:40 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:35:40 PM	Tube furnace set to 0
6/3/2011	1:36:40 PM	H2 valve closed
6/3/2011	1:36:40 PM	BCl3 valve closed
6/3/2011	1:36:40 PM	PH3 valve closed
6/3/2011	1:36:40 PM	SiCl4 pre valve closed
6/3/2011	1:36:40 PM	SiCl4 post valve closed
6/3/2011	1:36:40 PM	Bubbler valve closed
6/3/2011	1:36:40 PM	Helium valve opened
6/3/2011	1:36:40 PM	Main Vac valve opened
6/3/2011	1:36:40 PM	Bypass valve opened
6/3/2011	1:36:40 PM	Helium MFC set to  100.000000
6/3/2011	1:36:40 PM	H2 MFC set to  0.000000
6/3/2011	1:36:40 PM	BCl3 MFC set to  0.000000
6/3/2011	1:36:40 PM	PHl3 MFC set to  0.000000
6/3/2011	1:36:40 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:36:40 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:36:40 PM	Tube furnace set to 0
6/3/2011	1:37:40 PM	Helium valve closed
6/3/2011	1:37:40 PM	H2 valve closed
6/3/2011	1:37:40 PM	BCl3 valve closed
6/3/2011	1:37:40 PM	PH3 valve closed
6/3/2011	1:37:40 PM	SiCl4 pre valve closed
6/3/2011	1:37:40 PM	SiCl4 post valve closed
6/3/2011	1:37:40 PM	Bubbler valve closed
6/3/2011	1:37:40 PM	Main Vac valve opened
6/3/2011	1:37:40 PM	Bypass valve opened
6/3/2011	1:37:40 PM	Helium MFC set to  0.000000
6/3/2011	1:37:40 PM	H2 MFC set to  0.000000
6/3/2011	1:37:40 PM	BCl3 MFC set to  0.000000
6/3/2011	1:37:40 PM	PHl3 MFC set to  0.000000
6/3/2011	1:37:40 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:37:40 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:37:40 PM	Tube furnace set to 0
6/3/2011	1:38:40 PM	H2 valve closed
6/3/2011	1:38:40 PM	BCl3 valve closed
6/3/2011	1:38:40 PM	PH3 valve closed
6/3/2011	1:38:40 PM	SiCl4 pre valve closed
6/3/2011	1:38:40 PM	SiCl4 post valve closed
6/3/2011	1:38:40 PM	Bubbler valve closed
6/3/2011	1:38:40 PM	Helium valve opened
6/3/2011	1:38:40 PM	Main Vac valve opened
6/3/2011	1:38:40 PM	Bypass valve opened
6/3/2011	1:38:40 PM	Helium MFC set to  100.000000
6/3/2011	1:38:40 PM	H2 MFC set to  0.000000
6/3/2011	1:38:40 PM	BCl3 MFC set to  0.000000
6/3/2011	1:38:40 PM	PHl3 MFC set to  0.000000
6/3/2011	1:38:40 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:38:40 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:38:40 PM	Tube furnace set to 0
6/3/2011	1:39:40 PM	Helium valve closed
6/3/2011	1:39:40 PM	H2 valve closed
6/3/2011	1:39:40 PM	BCl3 valve closed
6/3/2011	1:39:40 PM	PH3 valve closed
6/3/2011	1:39:40 PM	SiCl4 pre valve closed
6/3/2011	1:39:40 PM	SiCl4 post valve closed
6/3/2011	1:39:40 PM	Bubbler valve closed
6/3/2011	1:39:40 PM	Main Vac valve opened
6/3/2011	1:39:40 PM	Bypass valve opened
6/3/2011	1:39:40 PM	Helium MFC set to  0.000000
6/3/2011	1:39:40 PM	H2 MFC set to  0.000000
6/3/2011	1:39:40 PM	BCl3 MFC set to  0.000000
6/3/2011	1:39:40 PM	PHl3 MFC set to  0.000000
6/3/2011	1:39:40 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:39:40 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:39:41 PM	Tube furnace set to 0
6/3/2011	1:40:41 PM	H2 valve closed
6/3/2011	1:40:41 PM	BCl3 valve closed
6/3/2011	1:40:41 PM	PH3 valve closed
6/3/2011	1:40:41 PM	SiCl4 pre valve closed
6/3/2011	1:40:41 PM	SiCl4 post valve closed
6/3/2011	1:40:41 PM	Bubbler valve closed
6/3/2011	1:40:41 PM	Helium valve opened
6/3/2011	1:40:41 PM	Main Vac valve opened
6/3/2011	1:40:41 PM	Bypass valve opened
6/3/2011	1:40:41 PM	Helium MFC set to  100.000000
6/3/2011	1:40:41 PM	H2 MFC set to  0.000000
6/3/2011	1:40:41 PM	BCl3 MFC set to  0.000000
6/3/2011	1:40:41 PM	PHl3 MFC set to  0.000000
6/3/2011	1:40:41 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:40:41 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:40:41 PM	Tube furnace set to 0
6/3/2011	1:41:41 PM	Helium valve closed
6/3/2011	1:41:41 PM	H2 valve closed
6/3/2011	1:41:41 PM	BCl3 valve closed
6/3/2011	1:41:41 PM	PH3 valve closed
6/3/2011	1:41:41 PM	SiCl4 pre valve closed
6/3/2011	1:41:41 PM	SiCl4 post valve closed
6/3/2011	1:41:41 PM	Bubbler valve closed
6/3/2011	1:41:41 PM	Main Vac valve opened
6/3/2011	1:41:41 PM	Bypass valve opened
6/3/2011	1:41:41 PM	Helium MFC set to  0.000000
6/3/2011	1:41:41 PM	H2 MFC set to  0.000000
6/3/2011	1:41:41 PM	BCl3 MFC set to  0.000000
6/3/2011	1:41:41 PM	PHl3 MFC set to  0.000000
6/3/2011	1:41:41 PM	SiCl4 MFC set to  0.000000
6/3/2011	1:41:41 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	1:41:41 PM	Tube furnace set to 0
6/3/2011	1:41:42 PM	Run finished at 1:41 PM
6/3/2011	1:41:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/3/2011	3:42:29 PM	Recipe started at 3:42 PM
6/3/2011	3:42:29 PM	Helium valve closed
6/3/2011	3:42:29 PM	BCl3 valve closed
6/3/2011	3:42:29 PM	PH3 valve closed
6/3/2011	3:42:29 PM	SiCl4 pre valve closed
6/3/2011	3:42:29 PM	SiCl4 post valve closed
6/3/2011	3:42:29 PM	Main Vac valve closed
6/3/2011	3:42:29 PM	Bypass valve closed
6/3/2011	3:42:29 PM	Bubbler valve closed
6/3/2011	3:42:29 PM	H2 valve opened
6/3/2011	3:42:29 PM	Helium MFC set to  0.000000
6/3/2011	3:42:29 PM	H2 MFC set to  500.000000
6/3/2011	3:42:29 PM	BCl3 MFC set to  0.000000
6/3/2011	3:42:29 PM	PHl3 MFC set to  0.000000
6/3/2011	3:42:29 PM	SiCl4 MFC set to  0.000000
6/3/2011	3:42:29 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	3:42:30 PM	Tube furnace set to 1000
6/3/2011	3:43:52 PM	Helium valve closed
6/3/2011	3:43:52 PM	BCl3 valve closed
6/3/2011	3:43:52 PM	PH3 valve closed
6/3/2011	3:43:52 PM	SiCl4 pre valve closed
6/3/2011	3:43:52 PM	SiCl4 post valve closed
6/3/2011	3:43:52 PM	Main Vac valve closed
6/3/2011	3:43:52 PM	Bypass valve closed
6/3/2011	3:43:52 PM	H2 valve opened
6/3/2011	3:43:52 PM	Bubbler valve opened
6/3/2011	3:43:52 PM	Helium MFC set to  0.000000
6/3/2011	3:43:52 PM	H2 MFC set to  500.000000
6/3/2011	3:43:52 PM	BCl3 MFC set to  0.000000
6/3/2011	3:43:52 PM	PHl3 MFC set to  0.000000
6/3/2011	3:43:52 PM	SiCl4 MFC set to  0.000000
6/3/2011	3:43:52 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	3:43:52 PM	Tube furnace set to 1000
6/3/2011	3:43:52 PM	Helium valve closed
6/3/2011	3:43:52 PM	H2 valve closed
6/3/2011	3:43:52 PM	BCl3 valve closed
6/3/2011	3:43:52 PM	PH3 valve closed
6/3/2011	3:43:52 PM	SiCl4 pre valve closed
6/3/2011	3:43:52 PM	SiCl4 post valve closed
6/3/2011	3:43:52 PM	Main Vac valve closed
6/3/2011	3:43:52 PM	Bubbler valve closed
6/3/2011	3:43:52 PM	Bypass valve closed
6/3/2011	3:43:52 PM	Helium MFC set to  0.000000
6/3/2011	3:43:52 PM	H2 MFC set to  0.000000
6/3/2011	3:43:52 PM	BCl3 MFC set to  0.000000
6/3/2011	3:43:52 PM	PHl3 MFC set to  0.000000
6/3/2011	3:43:52 PM	SiCl4 MFC set to  0.000000
6/3/2011	3:43:52 PM	Bypass solenoid MFC set to  760.000000
6/3/2011	3:43:52 PM	Tube furnace set to 0
6/3/2011	3:43:52 PM	Baratron reads 738.255837 Torr and NaOH valve is open.  Emergency exit.
6/3/2011	3:55:48 PM	Run aborted at 3:55 PM
6/3/2011	3:56:01 PM	Helium MFC set to  10.000000
6/3/2011	3:56:02 PM	Helium valve opened
6/3/2011	3:56:25 PM	Helium MFC set to  100.000000
6/3/2011	3:56:30 PM	Helium valve closed
6/3/2011	3:56:36 PM	Recipe started at 3:56 PM
6/3/2011	3:56:36 PM	Helium valve closed
6/3/2011	3:56:36 PM	BCl3 valve closed
6/3/2011	3:56:36 PM	PH3 valve closed
6/3/2011	3:56:36 PM	SiCl4 pre valve closed
6/3/2011	3:56:36 PM	SiCl4 post valve closed
6/3/2011	3:56:36 PM	Main Vac valve closed
6/3/2011	3:56:36 PM	Bypass valve closed
6/3/2011	3:56:36 PM	Bubbler valve closed
6/3/2011	3:56:36 PM	H2 valve opened
6/3/2011	3:56:36 PM	Helium MFC set to  0.000000
6/3/2011	3:56:36 PM	H2 MFC set to  500.000000
6/3/2011	3:56:36 PM	BCl3 MFC set to  0.000000
6/3/2011	3:56:36 PM	PHl3 MFC set to  0.000000
6/3/2011	3:56:36 PM	SiCl4 MFC set to  0.000000
6/3/2011	3:56:36 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	3:56:37 PM	Tube furnace set to 1000
6/3/2011	3:56:37 PM	Helium valve closed
6/3/2011	3:56:37 PM	BCl3 valve closed
6/3/2011	3:56:37 PM	PH3 valve closed
6/3/2011	3:56:37 PM	SiCl4 pre valve closed
6/3/2011	3:56:37 PM	SiCl4 post valve closed
6/3/2011	3:56:37 PM	Main Vac valve closed
6/3/2011	3:56:37 PM	Bypass valve closed
6/3/2011	3:56:37 PM	H2 valve opened
6/3/2011	3:56:37 PM	Bubbler valve opened
6/3/2011	3:56:37 PM	Helium MFC set to  0.000000
6/3/2011	3:56:37 PM	H2 MFC set to  500.000000
6/3/2011	3:56:37 PM	BCl3 MFC set to  0.000000
6/3/2011	3:56:37 PM	PHl3 MFC set to  0.000000
6/3/2011	3:56:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	3:56:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	3:56:37 PM	Tube furnace set to 1000
6/3/2011	4:16:37 PM	Helium valve closed
6/3/2011	4:16:37 PM	BCl3 valve closed
6/3/2011	4:16:37 PM	PH3 valve closed
6/3/2011	4:16:37 PM	SiCl4 pre valve closed
6/3/2011	4:16:37 PM	SiCl4 post valve closed
6/3/2011	4:16:37 PM	Main Vac valve closed
6/3/2011	4:16:37 PM	Bypass valve closed
6/3/2011	4:16:37 PM	H2 valve opened
6/3/2011	4:16:37 PM	Bubbler valve opened
6/3/2011	4:16:37 PM	Helium MFC set to  0.000000
6/3/2011	4:16:37 PM	H2 MFC set to  500.000000
6/3/2011	4:16:37 PM	BCl3 MFC set to  0.000000
6/3/2011	4:16:37 PM	PHl3 MFC set to  0.000000
6/3/2011	4:16:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	4:16:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	4:16:37 PM	Tube furnace set to 750
6/3/2011	4:36:37 PM	H2 valve closed
6/3/2011	4:36:37 PM	BCl3 valve closed
6/3/2011	4:36:37 PM	PH3 valve closed
6/3/2011	4:36:37 PM	SiCl4 pre valve closed
6/3/2011	4:36:37 PM	SiCl4 post valve closed
6/3/2011	4:36:37 PM	Main Vac valve closed
6/3/2011	4:36:37 PM	Bypass valve closed
6/3/2011	4:36:37 PM	Helium valve opened
6/3/2011	4:36:37 PM	Bubbler valve opened
6/3/2011	4:36:37 PM	Helium MFC set to  500.000000
6/3/2011	4:36:37 PM	H2 MFC set to  0.000000
6/3/2011	4:36:37 PM	BCl3 MFC set to  0.000000
6/3/2011	4:36:37 PM	PHl3 MFC set to  0.000000
6/3/2011	4:36:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	4:36:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	4:36:37 PM	Tube furnace set to 0
6/3/2011	4:56:37 PM	Helium valve closed
6/3/2011	4:56:37 PM	H2 valve closed
6/3/2011	4:56:37 PM	BCl3 valve closed
6/3/2011	4:56:37 PM	PH3 valve closed
6/3/2011	4:56:37 PM	SiCl4 pre valve closed
6/3/2011	4:56:37 PM	SiCl4 post valve closed
6/3/2011	4:56:37 PM	Main Vac valve closed
6/3/2011	4:56:37 PM	Bypass valve closed
6/3/2011	4:56:37 PM	Bubbler valve closed
6/3/2011	4:56:37 PM	Helium MFC set to  0.000000
6/3/2011	4:56:37 PM	H2 MFC set to  0.000000
6/3/2011	4:56:37 PM	BCl3 MFC set to  0.000000
6/3/2011	4:56:37 PM	PHl3 MFC set to  0.000000
6/3/2011	4:56:37 PM	SiCl4 MFC set to  0.000000
6/3/2011	4:56:37 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	4:56:37 PM	Tube furnace set to 0
6/3/2011	4:56:38 PM	Run finished at 4:56 PM
6/3/2011	7:15:20 PM	Helium MFC set to  100.000000
6/3/2011	7:15:24 PM	Helium valve opened
6/3/2011	7:15:57 PM	Helium valve closed
6/3/2011	7:16:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2011	7:16:57 PM	Recipe started at 7:16 PM
6/3/2011	7:16:57 PM	Helium valve closed
6/3/2011	7:16:57 PM	H2 valve closed
6/3/2011	7:16:57 PM	BCl3 valve closed
6/3/2011	7:16:57 PM	PH3 valve closed
6/3/2011	7:16:57 PM	SiCl4 pre valve closed
6/3/2011	7:16:57 PM	SiCl4 post valve closed
6/3/2011	7:16:57 PM	Main Vac valve closed
6/3/2011	7:16:57 PM	Bubbler valve closed
6/3/2011	7:16:57 PM	Bypass valve opened
6/3/2011	7:16:57 PM	Helium MFC set to  0.000000
6/3/2011	7:16:57 PM	H2 MFC set to  0.000000
6/3/2011	7:16:57 PM	BCl3 MFC set to  0.000000
6/3/2011	7:16:57 PM	PHl3 MFC set to  0.000000
6/3/2011	7:16:57 PM	SiCl4 MFC set to  0.000000
6/3/2011	7:16:57 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	7:16:57 PM	Tube furnace set to 0
6/3/2011	7:17:27 PM	Helium valve closed
6/3/2011	7:17:27 PM	H2 valve closed
6/3/2011	7:17:27 PM	BCl3 valve closed
6/3/2011	7:17:27 PM	PH3 valve closed
6/3/2011	7:17:27 PM	SiCl4 pre valve closed
6/3/2011	7:17:27 PM	SiCl4 post valve closed
6/3/2011	7:17:27 PM	Bubbler valve closed
6/3/2011	7:17:27 PM	Main Vac valve opened
6/3/2011	7:17:27 PM	Bypass valve opened
6/3/2011	7:17:27 PM	Helium MFC set to  0.000000
6/3/2011	7:17:27 PM	H2 MFC set to  0.000000
6/3/2011	7:17:27 PM	BCl3 MFC set to  0.000000
6/3/2011	7:17:27 PM	PHl3 MFC set to  0.000000
6/3/2011	7:17:27 PM	SiCl4 MFC set to  0.000000
6/3/2011	7:17:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2011	7:17:27 PM	Tube furnace set to 0
6/3/2011	7:17:28 PM	Run finished at 7:17 PM
6/3/2011	7:17:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
